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The Reactive Sputter Deposition of Aluminum Oxide Coatings Using High Power Pulsed Magnetron Sputtering (HPPMS)

Author(s):
  • W.D. Sproul ( Advanced Energy Industries, Inc., Fort Collins, CO )
  • D.J. Christie ( Advanced Energy Industries, Inc., Fort Collins, CO )
  • D.C. Carter ( Advanced Energy Industries, Inc., Fort Collins, CO )
Publication title:
47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
47
Pub. Year:
2004
Page(from):
96
Page(to):
100
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/47
Type:
Conference Proceedings

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