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Fundamentals of Feedback Control for Reactive Sputtering

Author(s):
  • M.A. George ( Deposition Sciences Incorporated, Santa Rosa, CA )
  • E.A. Craves ( Deposition Sciences Incorporated, Santa Rosa, CA )
  • R. Shehab ( Ametek Incorporated, Pittsburgh, PA )
  • K. Knox ( Ametek Incorporated, Pittsburgh, PA )
Publication title:
47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
47
Pub. Year:
2004
Page(from):
62
Page(to):
66
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/47
Type:
Conference Proceedings

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