Effective Closed-Loop Control for Reactive Sputtering Using Two Reactive Gases
- Author(s):
- D.C. Carter ( Advanced Energy Industries, Inc., Fort Collins, CO )
- W.D. Sproul ( Advanced Energy Industries, Inc., Fort Collins, CO )
- D.J. Christie ( Advanced Energy Industries, Inc., Fort Collins, CO )
- Publication title:
- 47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas
- Title of ser.:
- Annual Technical Conference of Society of Vacuum Coaters
- Ser. no.:
- 47
- Pub. Year:
- 2004
- Page(from):
- 37
- Page(to):
- 43
- Pages:
- 7
- Pub. info.:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- Language:
- English
- Call no.:
- A63930/47
- Type:
- Conference Proceedings
Similar Items:
|
Society of Vacuum Coaters |
Society of Vacuum Coaters |
|
Society of Vacuum Coaters |
8
Conference Proceedings
High Power Pulsed Reactive Sputtering of Zirconium Oxide and Tantalum Oxide
Society of Vacuum Coaters |
|
3
Conference Proceedings
The Reactive Sputter Deposition of Aluminum Oxide Coatings Using High Power Pulsed Magnetron Sputtering (HPPMS)
Society of Vacuum Coaters |
Society of Vacuum Coaters |
|
4
Conference Proceedings
A Novel Pulsed Supply With Arc Handling and Leading Edge Control as Enabling Technology for High Power Pulsed Magnetron Sputtering (HPPMS)
Society of Vacuum Coaters |
Society of Vacuum Coaters |
|
5
Conference Proceedings
Mid-Frequency Dual Magnetron Reactive Co-Sputtering for Deposition of Customized Index Optical Films
Society of Vacuum Coaters |
Society of Vacuum Coaters |
|
6
Conference Proceedings
Integrated Process Control for Reactive Sputter Deposition of Dielectric Thin Films
Society of Vacuum Coaters |
SPIE - The International Society for Optical Engineering |