Plasma-Enhanced Chemical Vapor Deposition of Transparent Barrier Coatings
- Author(s):
- G. Czeremuszkin ( Nova-Plasma Inc., Montréal, Quebec, Canada )
- M. Latreche ( Nova-Plasma Inc., Montréal, Quebec, Canada )
- M.R. Wertheimer ( École Polytechnique, Montréal, Quebec, Canada )
- Publication title:
- 46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California
- Title of ser.:
- Annual Technical Conference of Society of Vacuum Coaters
- Ser. no.:
- 46
- Pub. Year:
- 2003
- Page(from):
- 586
- Page(to):
- 591
- Pages:
- 6
- Pub. info.:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- Language:
- English
- Call no.:
- A63930/46
- Type:
- Conference Proceedings
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