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Variable Duty Cycle Pulsed Discharges to Control Coating Compositions During RF Plasma Polymerizations

Author(s):
  • J. Cho ( University of Texas at Arlington, Arlington, TX )
  • R.B. Timmons ( University of Texas at Arlington, Arlington, TX )
  • H. Qiu ( STMicroelectronics, Carrollton, TX )
Publication title:
46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
46
Pub. Year:
2003
Page(from):
457
Page(to):
461
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/46
Type:
Conference Proceedings

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