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Magnetron as Cathode-Neutralizer for Ion Source in Ion-Assisted Operation

Author(s):
  • V.V. Zhurin ( Kaufman & Robinson, Inc., Fort Collins, CO )
  • H.R. Kaufman ( Kaufman & Robinson, Inc., Fort Collins, CO )
  • J.R. Kahn ( Kaufman & Robinson, Inc., Fort Collins, CO )
  • K.A. Thompson ( Kaufman & Robinson, Inc., Fort Collins, CO )
Publication title:
46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
46
Pub. Year:
2003
Page(from):
442
Page(to):
446
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/46
Type:
Conference Proceedings

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