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Power System Requirements for Enhanced Mid-Frequency Process Stability

Author(s):
  • D.J. Christie ( Advanced Energy Industries, Inc., Fort Collins, CO )
  • E.A. Seymour ( Advanced Energy Industries, Inc., Fort Collins, CO )
Publication title:
46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
46
Pub. Year:
2003
Page(from):
257
Page(to):
262
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/46
Type:
Conference Proceedings

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