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Carbon Thin Film Deposition Using High Power Pulsed Magnetron Sputtering

Author(s):
B.M. DeKoven ( Intevac, Inc., Santa Clara, CA, )
P.R. Ward ( Intevac, Inc., Santa Clara, CA, )
R.E. Weiss ( Intevac, Inc., Santa Clara, CA, )
D.J. Christie ( Advanced Energy Industries, Inc., Fort Collins, CO )
R.A. Scholl ( Advanced Energy Industries, Inc., Fort Collins, CO )
W.D. Sproul ( Advanced Energy Industries, Inc., Fort Collins, CO )
F. Tomasel ( Advanced Energy Industries, Inc., Fort Collins, CO )
A. Anders ( Lawrence Berkeley National Laboratory, Berkeley, CA )
3 more
Publication title:
46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
46
Pub. Year:
2003
Page(from):
158
Page(to):
168
Pages:
11
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/46
Type:
Conference Proceedings

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