Control of the Reactive Sputtering Process Using Two Reactive Gases

Control of the Reactive Sputtering Process Using Two Reactive Gases

Author(s):

W.D. Sproul ( Advanced Energy Industries, Inc., Fort Collins, CO )
D.J. Christie ( Advanced Energy Industries, Inc., Fort Collins, CO )
D.C. Carter ( Advanced Energy Industries, Inc., Fort Collins, CO )
S. Berg ( Uppsala University, Uppsala, Sweden )
T. Nyberg ( Uppsala University, Uppsala, Sweden )

Publication title:

46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

46

Pub. Year:

2003

Page(from):

98

Page(to):

103

Pages:

6

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/46

Type:

Conference Proceedings

Details

TDL ID:	ZA00049384
Series ID:	PA00000013
Conf. info. (Name):	Society of Vacuum Coaters. Annual technical conference
Conf. info. (Number):	2003 : 46th
Conf. info. (Venue):	San Francisco, California USA
Conf. info. (Date):	2003.03.03-2003.03.08

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