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Integrated Process Control for Reactive Sputter Deposition of Dielectric Thin Films

Author(s):
  • D. Carter ( Advanced Energy Industries, Inc., Fort Collins, CO )
  • W.D. Sproul ( Advanced Energy Industries, Inc., Fort Collins, CO )
  • D. Christie ( Advanced Energy Industries, Inc., Fort Collins, CO )
Publication title:
46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
46
Pub. Year:
2003
Page(from):
23
Page(to):
28
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/46
Type:
Conference Proceedings

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