Deposition of Titanium Dioxide by High-Rate, Ion-Assisted Electron Beam Evaporation
- Author(s):
- N. Schiller ( Fraunhofer-Institute Elektronenstrahl-und Plasmatechnik (FEP), Dresden, Germany )
- M. Krug ( Fraunhofer-Institute Elektronenstrahl-und Plasmatechnik (FEP), Dresden, Germany )
- S. Straach ( Fraunhofer-Institute Elektronenstrahl-und Plasmatechnik (FEP), Dresden, Germany )
- M. Neumann ( Fraunhofer-Institute Elektronenstrahl-und Plasmatechnik (FEP), Dresden, Germany )
- Publication title:
- 45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida
- Title of ser.:
- Annual Technical Conference of Society of Vacuum Coaters
- Ser. no.:
- 45
- Pub. Year:
- 2002
- Page(from):
- 440
- Page(to):
- 442
- Pages:
- 3
- Pub. info.:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- Language:
- English
- Call no.:
- A63930/45
- Type:
- Conference Proceedings
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