Influence of Recapture of Secondary Electrons on the Magnetron Sputtering Deposition Process

Author(s):

G. Buyle ( State University of Ghent, Ghent, Belgium )

D. Depla ( State University of Ghent, Ghent, Belgium )

K. Eufinger ( State University of Ghent, Ghent, Belgium )

J. Haemers ( State University of Ghent, Ghent, Belgium )

R. De Gryse ( State University of Ghent, Ghent, Belgium )

W. De Bosscher ( Bekaert Advanced Coatings (Bekaert VDS), Deinze, Belgium )

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Publication title:

45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

45

Pub. Year:

2002

Page(from):

348

Page(to):

353

Pages:

6

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/45

Type:

Conference Proceedings