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CrN Deposition by Reactive High-Power Density Pulsed Magnetron Sputtering

Author(s):
  • A.P. Ehiasarian ( Sheffield-Hallam University, Sheffield, United Kingdom )
  • W.-D. Manz ( Sheffield-Hallam University, Sheffield, United Kingdom )
  • L. Hultman ( Linköping University, Linköping, Sweden )
  • U. Helmersson ( Linköping University, Linköping, Sweden )
Publication title:
45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
45
Pub. Year:
2002
Page(from):
328
Page(to):
334
Pages:
7
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/45
Type:
Conference Proceedings

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