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Substrate Response During Dual Bipolar Pulsed Magnetron Sputtering

Author(s):
  • J. O'Brien ( University of Salford, Salford, United Kingdom )
  • P.J. Kelly ( University of Salford, Salford, United Kingdom )
  • J.W. Bradley ( UMIST, Manchester, United Kingdom )
  • R. Hall ( Advanced Energy Industries UK Ltd., Bicester, United Kingdom )
  • R.D. Arnell ( University of Salford, Salford, United Kingdom )
Publication title:
45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
45
Pub. Year:
2002
Page(from):
306
Page(to):
314
Pages:
9
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/45
Type:
Conference Proceedings

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