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Optical Monitoring of Thin Films Using Spectroscopic Ellipsometry

Author(s):
  • D.E. Morton ( Denton Vacuum, LLC, Moorestown, NJ )
  • B. Johs ( JA. Woollam Co., Inc., Lincoln, NE )
  • J. Hale ( JA. Woollam Co., Inc., Lincoln, NE )
Publication title:
45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
45
Pub. Year:
2002
Page(from):
299
Page(to):
305
Pages:
7
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/45
Type:
Conference Proceedings

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