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Comparison of Different Concepts for the Stabilization of Reactive Sputtering Processes Decorative & Functional Coating

Author(s):
  • N. Malkomes ( Fraunhofer Institute for Thin Films and Surface Engineering (IST), Braunschweig, Germany )
  • A. Pflug ( Fraunhofer Institute for Thin Films and Surface Engineering (IST), Braunschweig, Germany )
  • B. Szyszka ( Fraunhofer Institute for Thin Films and Surface Engineering (IST), Braunschweig, Germany )
  • M. Vergöhl ( Fraunhofer Institute for Thin Films and Surface Engineering (IST), Braunschweig, Germany )
Publication title:
45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
45
Pub. Year:
2002
Page(from):
41
Page(to):
48
Pages:
8
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/45
Type:
Conference Proceedings

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