Arc Discharges in the Reactive Sputtering of Electrical Insulating Compounds

Author(s):

• A. Segers ( Bekaert N.V., Zwevegem, Belgium )
• D. Depla ( State University of Ghent, Ghent, Belgium )
• K. Eufinger ( State University of Ghent, Ghent, Belgium )
• J. Haemers ( State University of Ghent, Ghent, Belgium )
• R. De Gryse ( State University of Ghent, Ghent, Belgium )

Publication title:

45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

45

Pub. Year:

2002

Page(from):

30

Page(to):

35

Pages:

6

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/45

Type:

Conference Proceedings