Multi-Level Control for Reactive Sputtering

Multi-Level Control for Reactive Sputtering

Author(s):

W.D. Sproul ( Reactive Sputtering, Inc., Goleta, CA )
B.E. Sylvia ( Reactive Sputtering, Inc., Goleta, CA )

Publication title:

45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

45

Pub. Year:

2002

Page(from):

11

Page(to):

15

Pages:

5

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/45

Type:

Conference Proceedings

Details

TDL ID:	ZA00049383
Series ID:	PA00000013
Conf. info. (Name):	Annual Technical Conference Proceedings
Conf. info. (Number):	2002
Conf. info. (Venue):	Lake Buena Vista, Florida USA
Conf. info. (Date):	2002.04.13-2002.04.18

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