Blank Cover Image

Large Area Deposition of Transparent and Conductive ZnO:Al Layers by Reactive Mid Frequency Magnetron Sputtering

Author(s):
B. Szyszka ( Fraunhofer IST, Braunschweig, Germany )
T. Höing ( Fraunhofer IST, Braunschweig, Germany )
X. Jiang ( Fraunhofer IST, Braunschweig, Germany )
A. Bierhals ( Fraunhofer IST, Braunschweig, Germany )
N. Malkomes ( Fraunhofer IST, Braunschweig, Germany )
M. Vergöhl ( Fraunhofer IST, Braunschweig, Germany )
V. Sittinger ( Fraunhofer IST, Braunschweig, Germany )
U. Bringmann ( Fraunhofer IST, Braunschweig, Germany )
G. Bräuer ( Fraunhofer IST, Braunschweig, Germany )
4 more
Publication title:
44th Annual Technical Conference proceedings, April 21-26, 2001, Philadelphia, Pennsylvania
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
44
Pub. Year:
2001
Page(from):
272
Page(to):
276
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/44
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Dynamic Simulation of Process Control of the Reactive Sputter Process Using Two Separate Targets and Experimental Results

N. Malkomes, A. Bierhals, B. Szyszka, M. Vergöhl

Society of Vacuum Coaters
7 Conference Proceedings Development of Advanced Transparent Conductive Electrodes for Large-Area Opto-Electronic Devices

B. Szyszka, A. Gombert, P. Loebmann, C. May, C. Elsaesser

Society of Vacuum Coaters
2 Conference Proceedings Comparison of Different Concepts for the Stabilization of Reactive Sputtering Processes Decorative & Functional Coating

N. Malkomes, A. Pflug, B. Szyszka, M. Vergöhl

Society of Vacuum Coaters
8 Conference Proceedings Preparation of Photocatalytically Active TiO₂ Layers on Polycarbonate by Reactive Magnetron Sputtering

T. Neubert, O. Werner, F. Neumann, M. Vergöhl

Society of Vacuum Coaters
3 Conference Proceedings In-situ Spectroscopic Ellipsometry and Plasma Control for Large-Scale Magnetron Sputter Deposition Processes

M. Vergöhl, N. Malkomes, T. Matthée, G. Bräuer, U. Richter, F.-W. Nickolc, J. Bruch

Society of Vacuum Coaters
9 Conference Proceedings Polycrystalline ZnO- and ZnO:Al-Layers: Dependence of Film Stress and Electrical Properties on the Energy Input During the Magnetron Sputtering Deposition

Ellmer, K., Cebulla, R., Wendt, R.

MRS - Materials Research Society
4 Conference Proceedings Simulation of Reactive Magnetron Sputtering Kinetics in Real In-Line Processing Chambers

A. Pflug, N. Malkomes, V. Sittinger, B. Szyszka

Society of Vacuum Coaters
10 Conference Proceedings Research on Promising Applications for High Power Pulse Magnetron Sputtering

V. Sittinger, B. Szyszka, R. Bandorf, M. Vergöhl, A. Pflug, D.J. Christie, F. Ruske

Society of Vacuum Coaters
5 Conference Proceedings Transparent Conductive Oxide Semiconductor ZnO:Al Films Produced by Magnetron Reactive Sputtering

Chen, Meng, Pei, Zhiliang, Xi, Wang, Sun, Cao, Wen, Lishi

Materials Research Society
11 Conference Proceedings IR-Transparent Electrically Conductive CuAlxOy Deposited by Reactive Magnetron Co-Sputtering

Johnson, L.F., Moran, M.B., Savrun, E., Sarikaya, M., Kolega, R.R.

Materials Research Society
6 Conference Proceedings Properties of TCO-Films Prepared by Reactive Magnetron Sputtering

B. Szyszka

Society of Vacuum Coaters
12 Conference Proceedings Temperature dependence of the optical properties of mixed oxide thin films deposited by reactive magnetron sputtering [5963-41]

Vergohl, M., Hunsche, B., Ritz, A.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12