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A New Generation of Power Supplies for Large Area Dual Magnetron Sputtering

Author(s):
  • D.J. Christie ( Advanced Energy Industries, Inc., Fort Collins, CO )
  • D. Kovalevskii ( Advanced Energy Industries, Inc., Fort Collins, CO )
  • D.E. Morgan ( Advanced Energy Industries, Inc., Fort Collins, CO )
  • E.A. Seymour ( Advanced Energy Industries, Inc., Fort Collins, CO )
Publication title:
44th Annual Technical Conference proceedings, April 21-26, 2001, Philadelphia, Pennsylvania
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
44
Pub. Year:
2001
Page(from):
228
Page(to):
233
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/44
Type:
Conference Proceedings

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