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In Situ Analysis of Particle Contamination in Magnetron Sputtering Process During Magnetic Media Manufacturing

Author(s):
  • F. Sequeda ( Universidad del Valle, Santiago de Cali, Colombia )
  • G.S. Selwyn ( Los Alamos National Laboratory, Los Alamos, NM )
Publication title:
44th Annual Technical Conference proceedings, April 21-26, 2001, Philadelphia, Pennsylvania
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
44
Pub. Year:
2001
Page(from):
29
Page(to):
38
Pages:
10
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/44
Type:
Conference Proceedings

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