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Thin Film Optical Materials for Use in Microtechnology

Author(s):
  • P.M. Martin ( Pacific Northwest National Laboratory, Richland,WA )
  • D.W. Matson ( Pacific Northwest National Laboratory, Richland,WA )
  • W.D. Bennett ( Pacific Northwest National Laboratory, Richland,WA )
  • J.W. Johnston ( Pacific Northwest National Laboratory, Richland,WA )
Publication title:
43rd Annual Technical Conference proceedings, April 15-20, 2000, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
43
Pub. Year:
2000
Page(from):
181
Page(to):
186
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/43
Type:
Conference Proceedings

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