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Atomistic Simulation and Subsequent Optimization of Boron USJ Using Pre-Amorphization and High Ramp Rates Annealing

Author(s):
Julien Singer
François Wacquant
Davy Villanueva
Frédéric Salvetti
Cyrille Laviron
Olga Cueto
Pierrette Rivallin
Martín Jaraíz
Alain Poncet
4 more
Publication title:
Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1070
Pub. Year:
2008
Page(from):
229
Page(to):
236
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605110400 [160511040X]
Language:
English
Call no.:
M23500/1070
Type:
Conference Proceedings

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