Efficacy of Damage Annealing in Advanced Ultra-Shallow Junction Processing
- Author(s):
Paul Timans Yao Zhi Hu Jeff Gelpey Steve McCoy Wilfried Lerch Silke Paul Detlef Bolze Hamid Kheyrandish - Publication title:
- Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 1070
- Pub. Year:
- 2008
- Page(from):
- 155
- Page(to):
- 162
- Pages:
- 8
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781605110400 [160511040X]
- Language:
- English
- Call no.:
- M23500/1070
- Type:
- Conference Proceedings
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