Micro-uniformity during laser anneal : metrology and physics
- Author(s):
W. Vandervorst E. Rosseel R. Lin D. H. Petersen T. Clarysse J. Goossens P. F. Nielsen K. Churton - Publication title:
- Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 1070
- Pub. Year:
- 2008
- Page(from):
- 41
- Page(to):
- 48
- Pages:
- 8
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781605110400 [160511040X]
- Language:
- English
- Call no.:
- M23500/1070
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
7
Conference Proceedings
SSRM And SCM Observation Of Enhanced Lateral As- and BF2-Diffusion Induced By Nitride Spacers
Materials Research Society |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
9
Conference Proceedings
SSRM and SCM Observation of Modified Lateral Diffusion of As, BF2 and Sb Induced by Nitride Spacers
Materials Research Society |
4
Conference Proceedings
Ultra-Shallow Junctions Formed by Co-Implantation and Sub-Melt Laser Annealing
Electrochemical Society |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
Electrochemical Society |
12
Conference Proceedings
In-Situ Raman Spectroscopy During Laser-Induced Chemical Vapor Deposition of Silicon and Silicon Carbonitride Thin Films
Electrochemical Society |