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Epitaxial Growth on 2° Off-axis 4H SiC Substrates with Addition of HCl

Author(s):
Jie Zhang
Swapna Sunkari
Janice Mazzola
Becky Tyrrell
Gray Stewart
R. Stahlbush
J. Caldwell
P. Klein
Michael Mazzola
Janna Casady
5 more
Publication title:
Silicon Carbide 2008--materials, processing and devices : symposium held March 25-27, 2008, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1069
Pub. Year:
2008
Page(from):
169
Page(to):
174
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605110394 [1605110396]
Language:
English
Call no.:
M23500/1069
Type:
Conference Proceedings

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