Simulation of Forescattered Electron Channeling Contrast Imaging of Threading Dislocations Penetrating SiC Surfaces

Simulation of Forescattered Electron Channeling Contrast Imaging of Threading Dislocations Penetrating SiC Surfaces

Author(s):

Mark E. Twigg

Publication title:

Advances in GaN, GaAs, SiC and related alloys on silicon substrates : symposium held March 24-28, 2008, San Francisco, U.S.A

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

1068

Pub. Year:

2008

Page(from):

267

Page(to):

272

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605110387 [1605110388]

Language:

English

Call no.:

M23500/1068

Type:

Conference Proceedings

Details

TDL ID:	ZA00049371
Series ID:	PA00000011
Conf. info. (Name):	Materials Research Society meeting ; Symposium on advances in GaN, GaAs, SiC and related alloys on silicon substrates
Conf. info. (Number):	2008
Conf. info. (Venue):	San Francisco, California, U.S.A.
Conf. info. (Date):	2008.05.24-2008.05.28

Similar Items:

1 Conference Proceedings Lateral/vertical Homoepitaxial Growth on 4H-SiC Surfaces Controlled by Dislocations Yoosuf N. Picard, Andrew J. Trunek, Philip G. Neudeck, Mark E. Twigg Materials Research Society	7 Conference Proceedings Electron Microscopy Investigation of the Role of Surface Steps in the Generation of Dislocations during MOCVD Growth of GaN on 4H-SiC Bassim, N.D., Twigg, M.E., Mastro, M.A., Neudeck, P.G., Eddy, C.R.Jr., Henry, R.L., Holm, R.N., Powell, J.A., Trunek, … Trans Tech Publications
2 Conference Proceedings Nondestructive defect measurement and surface analysis of 3C-SiC on Si (001) by electron channeling contrast imaging Yoosuf N. Picard, Christopher Locke, Christopher L. Frewin, Rachael L. Myers-Ward, Joshua D. Caldwell, Karl D. Hobart, … Materials Research Society	8 Conference Proceedings Crystalline Quality and Surface Morphology of 3C-SiC Films on Si Evaluated by Electron Channeling Contrast Imaging Y.N. Picard, C. Locke, C.L. Frewin, M.E. Twigg, S.E. Saddow Trans Tech Publications
3 Conference Proceedings Atomic Force Microscope Observation of Growth and Defects on As-Grown (111) 3C-SiC Mesa Surfaces Neudeck, Philip G., Trunek, Andrew J., Powell, J.Anthony Materials Research Society	9 Conference Proceedings Homoepitaxial 'Web Growth' of SiC to Terminate C-Axis Screw Dislocations and Enlarge Step-Free Surfaces Neudeck, P.G., Powell, J.A., Trunek, A., Spry, D., Beheim, G.M., Benavage, E., Abel, P., Vetter, W.M., Dudley, M. Trans Tech Publications
4 Conference Proceedings Growth Evolution of Gallium Nitride Films on Stepped and Step-Free SiC Surfaces Eddy, Charles R. Jr., Culbertson, James C., Bassim, Nabil D., Twigg, Mark E., Holm, Ronald T., Stahlbush, Robert E., … Materials Research Society	10 Conference Proceedings Homoepitaxial 'Web Growth' of SiC to Terminate C-Axis Screw Dislocations and Enlarge Step-Free Surfaces Neudeck, P.G., Powell, J.A., Trunek, A., Spry, D., Beheim, G.M., Benavage, E., Abel, P., Vetter, W.M., Dudley, M. Trans Tech Publications
5 Conference Proceedings Confinement of Screw Dislocations to Predetermined Lateral Positions in (0001) 4H-SiC Epilayers Using Homoepitaxial Web Growth Neudeck, Philip G., Spry, David J., Trunek, Andrew J., Powell, J.Anthony, Beheim, Glenn M. Materials Research Society	11 Conference Proceedings Step Free Surface Heteroepitaxy of 3C-SiC Layers on Patterned 4H/6H-SiC Mesas and Cantilevers Neudeck, P.G., Powell, J.A., Trunek, A.J., Spry, D.J. Trans Tech Publications
6 Conference Proceedings Recent Results From Epitaxial Growth on Step Free 4H-SiC Mesas Philip G. Neudeck, Andrew J. Trunek, David J. Spry, J. Anthony Powell, Hui Du, Marek Skowronski, Nabil D. Bassim, … Materials Research Society	12 Conference Proceedings Growth of Defect-Free 3C-SiC on 4H- and 6H-SiC Mesas Using Step-Free Surface Heteroepitaxy Neudeck, P.G., Powell, J.A., Trunek, A.J., Huang, X.R., Dudley, M. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12