A Miniature Silicon Condenser Microphone Improved with a Flexure Hinge Diaphragm and a Large Back Volume
- Author(s):
- Publication title:
- Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 1052
- Pub. Year:
- 2007
- Page(from):
- 197
- Page(to):
- 204
- Pages:
- 8
- Pub. info.:
- Warrendale: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558999909 [1558999906]
- Language:
- English
- Call no.:
- M23500/1052
- Type:
- Conference Proceedings
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