High Temperature Annealing Studies on the Piezoelectric Properties of Thin Aluminum Nitride Films | 東京工業大学附属図書館文献データベース

Blank Cover Image

High Temperature Annealing Studies on the Piezoelectric Properties of Thin Aluminum Nitride Films

Author(s):

Sridhar Kuchibhatla

J. Peter Hensel

Publication title:

Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

1052

Pub. Year:

2007

Page(from):

191

Page(to):

196

Pages:

6

Pub. info.:

Warrendale: Materials Research Society

ISSN:

02729172

ISBN:

9781558999909 [1558999906]

Language:

English

Call no.:

M23500/1052

Type:

Conference Proceedings

Details

TDL ID:	ZA00049369
Series ID:	PA00000011
Conf. info. (Name):	Symposium on microelectromechanical systems-materials and devices
Conf. info. (Number):	2007
Conf. info. (Venue):	Boston, Massachusetts, USA
Conf. info. (Date):	2007.11.26-2007.11.28

Similar Items:

1 Conference Proceedings Erbium Alloyed Aluminum Nitride Films For Piezoelectric Applications A. Kabulski, V. R. Pagán, D. Korakakis Materials Research Society	7 Conference Proceedings Harmonic Excitation of Surface Acoustic Waves on Gallium Nitride Thin Films for Biological and Chemical Sensor Applications J. Justice, L.E. Rodak, K. Lee, L.A. Hornak, D. Korakakis Materials Research Society
2 Conference Proceedings Fabrication and Piezoelectric Characterization of AlN Mesa Structures R. Farrell, A. Kabulski, V. R. Pagán, S. Yeldandi, X.A. Cao, P. Famouri, J. Peter Hensel, D. Korakakis Materials Research Society	8 Conference Proceedings Investigating the Stress and Crystal Quality of AlN Air-Bridges through Micro-Raman Scattering Sridhar Kuchibhatla, L.E. Rodak, D. Korakakis Materials Research Society
3 Conference Proceedings Harmonic Analysis of AlN Piezoelectric Mesa Structures Madhulika Mazumdar, A. Kabulski, R. Farrell, Sridhar Kuchibhatla, V. R. Pagán, D. Korakakis Materials Research Society	9 Conference Proceedings Finite Element Analysis of Aluminum Nitride Bimorph Actuators - The Influence of Contact Geometry and Position V. R. Pagán, D. Korakakis Materials Research Society
4 Conference Proceedings Fourier Transform Infrared Spectroscopy Characterization of AlN Thin Films Grown on Sacrificial Silicon Oxide Layers via Metal Organic Vapor Phase Expitaxy Sridhar Kuchibhatla, L.E. Rodak, D. Korakakis Materials Research Society	10 Conference Proceedings Study of epitaxial lateral overgrowth of GaN for application in the fabrication of optoelectric devices [6017-15] Berry Ann N. J., Rodak L. E., Kasarla K., Yang N., Korakakis D. SPIE - The International Society of Optical Engineering
5 Conference Proceedings Aluminum Nitride Thin Film Based Surface Acoustic Wave Sensors A. Kabulski, V. R. Pagán, D. Cortes, R. Burda, O. M. Mukdadi, D. Korakakis Materials Research Society	11 Conference Proceedings Characterization of Group III-Nitride Based Surface Acoustic Wave Devices for High Temperature Applications J. Justice, L.E. Rodak, V. Narang, K. Lee, L.A. Hornak, D. Korakakis Materials Research Society
6 Conference Proceedings Properties of Digital Aluminum Gallium Nitride Alloys Grown via Metal Organic Vapor Phase Epitaxy L. E. Rodak, D. Korakakis Materials Research Society	12 Conference Proceedings Study of ELOG GaN for Application in the Fabrication of Micro-Channels for Optoelectronic Devices Rodak, L. E., Berry Ann, N. J., Kasarla, Kalyan Reddy, Ying, Nanying, Korakakis, D. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12