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C-Axis Oriented ZnO Film by RF Sputtering and Its Integration With MEMS Processing

Author(s):
Publication title:
Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1052
Pub. Year:
2007
Page(from):
99
Page(to):
104
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558999909 [1558999906]
Language:
English
Call no.:
M23500/1052
Type:
Conference Proceedings

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