Blank Cover Image

Mechanical Properties of Sputtered Silicon Oxynitride Films by Nanoindentation

Author(s):
Publication title:
Fundamentals of nanoindentation and nanotribology IV : symposium held November 26-29, 2007, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1049
Pub. Year:
2007
Page(from):
175
Page(to):
180
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558999893 [1558999892]
Language:
English
Call no.:
M23500/1049
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings The Tunability in Mechanical Properties and Fracture Toughness of Sputtered Silicon Oxynitride Thin Films for MEMS-Based Infrared Detectors

I-Kuan Lin, Ping-Hsin Wu, Kuang-Shun Ou, Kuo-Shen Chen, Xin Zhang

Materials Research Society
7 Conference Proceedings Characterization on the Viscoelastic Property of PDMS in the Frequency Domain

Ping Du, I-Kuan Lin, Hongbing Lu, Xi lin, Xin Zhang

Materials Research Society
2 Conference Proceedings Residual Stress in Sputtered Silicon Oxycarbide Thin Films

Ping Du, I-Kuan Lin, Yunfei Yan, Xin Zhang

Materials Research Society
8 Conference Proceedings Microbridge Nanoindentation Testing of Plasma Enhanced Chemical Vapor Deposited Silicon Oxide Films

Cao, Zhiqiang, Zhang, Tong-Yi, Zhang, Xin

Materials Research Society
3 Conference Proceedings Mechanical and Material Characterization of Bilayer Microcantilever-Based IR detectors

I-Kuan Lin, Ping Du, Yanhang Zhang, Xin Zhang

Materials Research Society
9 Conference Proceedings Optical properties study of silicon oxynitride films deposited by RF magnetron sputtering

Zhu, Y., Gu, P., Ye, H., Shen, W.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Investigation upon Mechanical Properties of Thin Film Silicon Under Cryogenic Temperature

Zhao, Yi, Zhang, Xin

Materials Research Society
10 Conference Proceedings Influence of Substrate on Structure and Magnetic Properties of Bi0.9Nd0.1FeO3 Thin Films by Radio Frequency Magnetron …

Li, L.L., Liu, Qiu Xiang, Zou, Yan, Tang, Xin Gui, Jiang, Yan Ping

Trans Tech Publications
5 Conference Proceedings Reactively-sputtered Silicon-oxynitride Films and Filters

P. Ma, F. Lin, P.G. Verly

Society of Vacuum Coaters
11 Conference Proceedings Suppression of Inelastic Deformation in Multilayer Microcantilevers with Nanoscale Coating

I-Kuan Lin, Xin Zhang, Yanhang Zhang

Materials Research Society
6 Conference Proceedings Elastic and Viscoelastic Characterization of Polydimethylsiloxane (PDMS) for Cell-Mechanics Applications

I-Kuan Lin, Yen-Ming Liao, Yan Liu, Kuo-Shen Chen, Xin Zhang

Materials Research Society
12 Conference Proceedings Mechanical Characterization of Atomic Layer Deposited (ALD) Alumina for Applications in Corrosive Environments

Kuang-Shun Ou, I-Kuan Lin, Ping-Hsin Wu, Zhi-Kai Huang, Kuo-Shen Chen, Xin Zhang

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12