Dynamic Analysis of the Nonlinear Behavior of Capacitive MEMS Using the Finite Element Formulation
- Author(s):
- Publication title:
- 20th Biennial Conference on Mechanical Vibration and Noise, Parts A, B, and C; Volume 1
- Title of ser.:
- ASME Symposia Volumes
- Ser. no.:
- DETC 2005(1B)
- Pub. Year:
- 2005
- Vol.:
- 1B
- Paper no.:
- DETC2005-84994
- Page(from):
- 1319
- Page(to):
- 1326
- Pages:
- 8
- Pub. info.:
- New York, N.Y.: American Society of Mechanical Engineers
- ISBN:
- 9780791847381 [0791847381]
- Language:
- English
- Call no.:
- A11633/2005
- Type:
- Conference Proceedings
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