Dynamic Analysis of MEMS Resonators Under Primary-Resonance Excitation

Dynamic Analysis of MEMS Resonators Under Primary-Resonance Excitation

Author(s):

Publication title:

20th Biennial Conference on Mechanical Vibration and Noise, Parts A, B, and C; Volume 1

Title of ser.:

ASME Symposia Volumes

Ser. no.:

DETC 2005(1A)

Pub. Year:

2005

Vol.:

1A

Paper no.:

DETC2005-84146

Page(from):

397

Page(to):

404

Pages:

8

Pub. info.:

New York, N.Y.: American Society of Mechanical Engineers

ISBN:

9780791847381 [0791847381]

Language:

English

Call no.:

A11633/2005

Type:

Conference Proceedings

Details

TDL ID:	ZA00048591
Series ID:	PA00000270
Conf. info. (Name):	ASME International Design Engineering Technical Conferences ; Computers and Information in Engineering Conference ; Biennial Conference on Mechanical Vibration and Noise
Conf. info. (Number):	2005 ; 2005 ; 20th
Conf. info. (Venue):	Long Beach, California USA
Conf. info. (Date):	2005.09.24-2005.09.28

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