Mechanical Design and Modeling of a New MEMS Vertical Actuator
- Author(s):
- Publication title:
- 27th Biennial Mechanisms and Robotics Conference
- Title of ser.:
- ASME Symposia Volumes
- Ser. no.:
- DETC 2002(5B)
- Pub. Year:
- 2002
- Vol.:
- 5B
- Paper no.:
- DETC2002/MECH-34293
- Page(from):
- 813
- Page(to):
- 818
- Pages:
- 6
- Pub. info.:
- New York, N.Y.: American Society of Mechanical Engineers
- ISBN:
- 9780791836538 [0791836533]
- Language:
- English
- Call no.:
- A11633/2002
- Type:
- Conference Proceedings
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