Blank Cover Image

Study of Thin Film-Edge Induced Stresses in Silicon Substrates by Infrared Photoelasticity

Author(s):
Publication title:
15th Reliability, Stress Analysis, and Failure Prevention Conference and international issues in engineering design
Title of ser.:
ASME Symposia Volumes
Ser. no.:
DETC 2001(5)
Pub. Year:
2001
Vol.:
5
Paper no.:
DETC2001/RSAFP-21743
Page(from):
17
Page(to):
22
Pages:
6
Pub. info.:
New York, N.Y.: American Society of Mechanical Engineers
ISBN:
9780791835456 [0791835456]
Language:
English
Call no.:
A11633/2001
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Infrared Photoelastic Study of Thin-Film-Edge-Induced Stresses in Silicon Substrates

Peng, H.J., Wong, S.P., Zhao, Shounan

Materials Research Society
7 Conference Proceedings The Influence of Stress on the Growth of Titanium Silicide Thin Films on (001) Silicon Substrates

Cheng, S. L., Chang, S. M., Huang, H. Y., Peng, Y. C., Chen, L. J., Tsui, B. Y., Tsai, C. J., Guo, S. S.

MRS - Materials Research Society
2 Conference Proceedings Thin-Film-Edge-Induced Stresses in Substrates

Wong, S.P., Peng, H.J., Zhao, Shounan

Materials Research Society
8 Conference Proceedings Time-integrated and time-resolved photoluminescence in ZnO epitaxial thin films grown onto (100) silicon substrates by MOCVD

Guo, B., Li, Y. H., Ye, H., Gu, P. F., Wong, K. S.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Probing Process-induced Defects in Si Using Infrared Photoelastic Stress Measurement Technique

Liu, X.H., Wong, S.P., Peng, H.J., Ke, N., Zhao, Shounan

Materials Research Society
9 Conference Proceedings ESR STUDY OF FLUORINE IMPLANTED a-Si:H AND a-C:H THIN FILMS

Wong, S.P., Peng, Shaoqi, Ke, Ning, Li, Pengxu

Materials Research Society
4 Conference Proceedings Stress Distribution in Ultra Thin SiO2 Film/Si Substrate System Measured by a Low Level Birefringence Detection Technique

Liu, X.H., Peng, H.J., Wong, S.P., Zhao, Shounan

Materials Research Society
10 Conference Proceedings DOPING EFFECT IN HYDROGENATED AMORPHOUS CARBON THIN FILMS BY ION IMPLANTATION

Wong, S.P., Peng, Shaoqi

Materials Research Society
5 Conference Proceedings Measurement of Bonding Stress in Silicon High Power Device Structures by Infrared Photoelasticity Method

Peng, H. J., Wong, S. P., Lau, W. F., Ke, N., Zhao, S.

MRS - Materials Research Society
11 Conference Proceedings Low-level birefringence detection system for stress measurement in semiconductors

Peng, H.J., Wong, S., Liu, X.H., Lai, Y.W., Ho, H., Zhao, S.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Stress Distribution in Si Under Patterned Thin Film Structures

Wong, S. P., Huang, L., Guo, W. S., Cheung, W. Y., Zhao, Shounan

MRS - Materials Research Society
12 Conference Proceedings Defects Induced by Arsenic Ion Implantation and Thin Film-Edge Stresses

Chang,G., Ai,R., Chiou,H.-D.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12