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Study on ICP Dry Etching Technology for Nanostructure Photonic Device Fabrication

Author(s):
Publication title:
State-of-the-art program on compound semiconductors 46 (SOTAPOCS 46) and processes at the semiconductor/solution interface 2
Title of ser.:
ECS transactions
Ser. no.:
6(2)
Pub. Year:
2007
Page(from):
53
Page(to):
58
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775519 [1566775515]
Language:
English
Call no.:
E23400/6-2
Type:
Conference Proceedings

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