Blank Cover Image

Carbon Ouldiffusion from Ni(C)/Pt/Si Structures During Nickel Suicide Formation by Rapid Thermal Annealing

Author(s):
Publication title:
Microelectronics Technology and Devices : SBMICRO 2006
Title of ser.:
ECS transactions
Ser. no.:
4(1)
Pub. Year:
2006
Page(from):
503
Page(to):
514
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775120 [1566775124]
Language:
English
Call no.:
E23400/4-1
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings SEM/EDS Characterization of Ni and Ni/Pt Silicide Formation

Regis E. Santos, Ioshiaki Doi, Jacobus Swart, Sebastião G. Dos Santos Filho

Electrochemical Society
7 Conference Proceedings Formation of Nickel Monosilicide onto (100) Silicon Wafer Surfaces

Reis, R.W., Santos Filho, S.G., Lagana, A.A.M., Doi, I., Swart, J.W.

Electrochemical Society
2 Conference Proceedings Formation and Stability of Ni(Pt)Si/Poly-Si Layered Structure

Santos, R. E., Doi, I., Teixeira, R. C., Diniz, J. A., Swart, J. W., dos Santos, S. G.

Electrochemical Society
8 Conference Proceedings Clusters Formation by Rapid Thermal Annealing on SiO2/Ge and SiH/Ge Heterostructures

A. M. dos Anjos, J. A. Diniz, L. B. Zoccal, U. A. Mengui, M. A. Canesqui, I. Doi

Electrochemical Society
3 Conference Proceedings Formation of Nickel Silicides onto As-Doped Silicon Using a Thin Pt/Pd Interlayer

Reis, R. W., dos Santos Filho, S. G., Doi, I., Swart, J. W.

Electrochemical Society
9 Conference Proceedings Phaase Formation Sequence of Nickel Silicides from Rapid Thermal Annealing of Ni on 4H-SiC

Madsen,L.D., Svedberg,E.B., Radamson,H.H., Hallin,C., Hjorvarsson,B., ,C.Cabrai.Jr., Jordan-Sweet,J.L., Liavoie,C.

Trans Tech Publications
4 Conference Proceedings Formation and Characterization of the Ni(Pt)Si and NiSi for MOS Devices Applications

Santos, R.E., Doi, I., Diniz, J.A., Swan, J.W., dos Santos Filho, S.G.

Electrochemical Society
10 Conference Proceedings Junction formation in silicon by rapid thermal annealing

Fair, Richard B.

MRS - Materials Research Society
5 Conference Proceedings Thermal Stability of Ni/Pt Silicide Films on BF Doped and Undoped (100)Si

Santos, R. E., Doi, I., Hayashi, M.A., Diniz, J. A., DOS Santos Fo., S. G.

Electrochemical Society
11 Conference Proceedings Post-Silicidation Annealing Effects on Electrical and Structural Properties of NiPt Germanosilicide

M.A. Eleotério, I. Doi, R. Figueroa, J.A. Diniz, S.G. Dos Santos Filho

Electrochemical Society
6 Conference Proceedings Formation of Nickel Silicides onto (100) Silicon Wafcr Surfaces Using a Thin Platinum Interlayer

Reis, R.W., dos Santos Filho, S.G., Doi, I., Swart, J.W.

Electrochemical Society
12 Conference Proceedings DOPANT REDISTRIBUTION DURING Pd2Si FORMATION USING RAPID THERMAL ANNEALING

Alvi, N.S., Kwong, D.L., Hopkins, C.G., Bauman, S.G.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12