SOI Material Readiness for 45nm and Sub-45nm Device Options
- Author(s):
- C. Maleville
- Publication title:
- High purity silicon 9
- Title of ser.:
- ECS transactions
- Ser. no.:
- 3(4)
- Pub. Year:
- 2006
- Page(from):
- 397
- Page(to):
- 408
- Pages:
- 12
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566775045 [1566775043]
- Language:
- English
- Call no.:
- E23400/3-4
- Type:
- Conference Proceedings
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