Blank Cover Image

Crystal Damage Removal by Spike and Flash Annealing

Author(s):
W. Lerch
S. Paul
J. Niess
S. McCoy
J. Gelpey
F. Cnistiano
R. Duffr
S. Boninelli
O. Marcelot
P. Francesco
5 more
Publication title:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 2: new materials, processes, and equipment
Title of ser.:
ECS transactions
Ser. no.:
3(2)
Pub. Year:
2006
Page(from):
77
Page(to):
84
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775021 [1566775027]
Language:
English
Call no.:
E23400/3-2
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings 2 Pattern effects during spike annealing of ultra-shallow implants

Niess, J., Ndnyei, Z., Lerch, W., Paul, S.

Electrochemical Society
7 Conference Proceedings Solid Phase Epitaxy- Activation and Deactivation of Boron in Ultra-Shallow Junctions

Lerch, W., Paul, S., Niess, J., Crisliano, F., Lamrani, Y., Colvo, P., Cherkashin, N., Downey, D.F., Arevalo, E.A.

Electrochemical Society
2 Conference Proceedings A Comparison Of Spike, Flash, SPER and Laser Annealing For 45nm CMOS

Lindsay, R., Pawlak, B., Kittl, J., Henson, K., Torregiani, C., Giangrandi, S., Surdeanu, R., Vandervorst, W., Mayur, …

Materials Research Society
8 Conference Proceedings Extended Defects Evolution in Pre-Amorphised Silicon after Millisecond Flash Anneals

F. Cristiano, E.M. Bazizi, P.F. Fazzini, S. Boninelli, R. Duffy

Trans Tech Publications
3 Conference Proceedings An Overview of ms Annealing for Deep Sub-Micron Activation

J.C. Gelpey, S. McCoy, D. Camm, W. Lerch

Trans Tech Publications
9 Conference Proceedings Implant Dose and Spike Anneal Temperature Relationships

Bourdelle, K.K., Fiory, A.T., Gossmann, H.-J. L., McCoy, S.P.

Materials Research Society
4 Conference Proceedings Implant Annealing - An Evolution from Soak over Spike to Millisecond Annealing

S. Paul, W. Lerch

Trans Tech Publications
10 Conference Proceedings Device Characteristics of Ultra-Shallow Junctions Formed by fRTP Annealing

Satta, A., Lindsay, R., Severi, S., Henson, K., Maex, K., McCoy, S., Gelpey, J., Elliott, K.

Materials Research Society
5 Conference Proceedings Millisecond Annealing: Past, Present and Future

Paul Timans, Jeff Gelpey, Steve McCoy, Wilfried Lerch, Silke Paul

Materials Research Society
11 Conference Proceedings Modeling and Simulation of Advanced Annealing Processes

A. Martinez-Limia, P. Pichler, C. Steen, S. Paul, W. Lerch

Trans Tech Publications
6 Conference Proceedings Efficacy of Damage Annealing in Advanced Ultra-Shallow Junction Processing

Paul Timans, Yao Zhi Hu, Jeff Gelpey, Steve McCoy, Wilfried Lerch, Silke Paul, Detlef Bolze, Hamid Kheyrandish

Materials Research Society
12 Conference Proceedings Advanced Thermal Processing of Semiconductor Materials by Flash Lamp Annealing

Skorupa, W., Panknin, D., Voelskow, M., Anwand, W., Gebel, T., Yankov, R.A., Paul, Silke, Lerch, Wilfried

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12