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Growth Technologies for 300mm Arsenic Heavily Doped Silicon Single Crystals

Author(s):
H. Tu
Q. Zhou
G. Zhang
X. Dai
Z. Wu
T. Jia
1 more
Publication title:
Silicon materials science and technology X
Title of ser.:
ECS transactions
Ser. no.:
2(2)
Pub. Year:
2006
Page(from):
89
Page(to):
94
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774390 [156677439X]
Language:
English
Call no.:
E23400/2-2
Type:
Conference Proceedings

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