Blank Cover Image

Clusters Formation by Rapid Thermal Annealing on SiO2/Ge and SiH/Ge Heterostructures

Author(s):
A. M. dos Anjos
J. A. Diniz
L. B. Zoccal
U. A. Mengui
M. A. Canesqui
I. Doi
1 more
Publication title:
Microelectronics Technology and Devices : SBMICRO 2007
Title of ser.:
ECS transactions
Ser. no.:
9(1)
Pub. Year:
2007
Page(from):
269
Page(to):
280
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775656 [1566775655]
Language:
English
Call no.:
E23400/9-1
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Simulation and Fabrication of Suspended-Membrane Resistive Microbolometers Using Gold-Black as Absorber

F.L. Della Lucia, J.W. Swart, L.B. Zoccal, J.A. Diniz, I. Doi

Electrochemical Society
7 Conference Proceedings Carbon Ouldiffusion from Ni(C)/Pt/Si Structures During Nickel Suicide Formation by Rapid Thermal Annealing

Ronaldo Reis, Sebastião G. dos Santos Fo, Ioshiaki Doi, Rogério Furlan, Richard Landers

Electrochemical Society
2 Conference Proceedings Post-Silicidation Annealing Effects on Electrical and Structural Properties of NiPt Germanosilicide

M.A. Eleotério, I. Doi, R. Figueroa, J.A. Diniz, S.G. Dos Santos Filho

Electrochemical Society
8 Conference Proceedings IN-SITU RAPID THERMAL ANNEALING OF HETEROSTRUCTURES GROWN BY MOLECULAR BEAM EPITAXY

Cerullo, M., Phillips, J. M., Anzlowar, M., Pfeiffer, L., Batstone, J.L, Galiano, M.

Materials Research Society
3 Conference Proceedings The Effect of Nitrogen Concentration at Silicon Oxynitride Gate Insulators Formed by 28N2+ Implantation into Silicon with Additional Conventional or Rapid …

Felicio, A.G., Diniz, J.A., Godoy Fo., J., Doi, I., Pudeozi, M.A.A., Swart, J.W.

Electrochemical Society
9 Conference Proceedings IN-SITU RAPID THERMAL ANNEALING OF HETEROSTRUCTURES GROWN BY MOLECULAR BEAM EPITAXY

Cerullo, M., Phillipis, Julia M., Anzlowar, M., Pfeiffer, L., Batstone, J. L., Galiano, M.

Materials Research Society
4 Conference Proceedings RAPID THERMAL ANNEALING OF DEPOSITED SiO2 FILMS

Wong, J., Lu, T-M., Cohen, S. S., Mehta, S.

Materials Research Society
10 Conference Proceedings Formation and Stability of Ni(Pt)Si/Poly-Si Layered Structure

Santos, R. E., Doi, I., Teixeira, R. C., Diniz, J. A., Swart, J. W., dos Santos, S. G.

Electrochemical Society
5 Conference Proceedings Thermal Stability of Ni/Pt Silicide Films on BF Doped and Undoped (100)Si

Santos, R. E., Doi, I., Hayashi, M.A., Diniz, J. A., DOS Santos Fo., S. G.

Electrochemical Society
11 Conference Proceedings Compositional and Electrical Differences of SiO2/SiC and SiO2/Si Structures Upon Thermal Annealing in N2O and NO

Stedile, F.C., Radtke, C., Baumvol, I.J.R., Boudinov, H., McDonald, K., Huang, M.B., Weller, R.A., Feldman, L.C., …

Electrochemical Society
6 Conference Proceedings ECR-CCD SiNx Passivation in GaAs-Based Devices

Zoccal, L. B., Diniz, J. A., Ramos, A. C. S.

Electrochemical Society
12 Conference Proceedings 10 GHz RF Passive Components Obtained by MCM-D Technology

L. B. Zoccal, C. M. Cabreira, S. D. Yamamoto, R. A. Flacker, E. A. Gomes, J. A. Diniz, J. W. Swart

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12