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EFFICIENT CLEANING OF LOW-к MATERIALS USING SINGLE-WAFER CLEANING SOLUTION: A COMPATIBILITY STUDY AND ELECTRICAL CHARACTERIZATION

Author(s):
Q. T. Le
J. Van Olmen
R. Vanderheyden
E. Kesters
K. Kenis
T. Conard
W. Boullart
M. R. Baklanov
S. Vanhaelemeersch
4 more
Publication title:
Cleaning Technology in Semiconductor Device Manufacturing IX
Title of ser.:
ECS transactions
Ser. no.:
1(3)
Pub. Year:
2006
Page(from):
164
Page(to):
171
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774291 [1566774292]
Language:
English
Call no.:
E23400/1-3
Type:
Conference Proceedings

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