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Dry Etching of Sub-Micron Emitter in InP Heterojunction Double Bipolar Transistor Using Inductively Coupled Plasma

Author(s):
P. Nam
P. C. Chang
D. Sawdai
V. Gambin
D. Scott
J. Gonzalez
D. Li
G. S. Leslie
X. Zeng
J. Wang
D. Matheson
L. Dang
R. Elmadjian
C. Grossman
M. Barsky
A. Gutierrez-Aitken
A. Oki
S. Olson
13 more
Publication title:
State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XLIII) and Nitride and Wide Bandgap Semiconductors for Sensors, Photonics, and Electronics VI
Title of ser.:
ECS transactions
Ser. no.:
1(2)
Pub. Year:
2006
Page(from):
88
Page(to):
93
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774314 [1566774314]
Language:
English
Call no.:
E23400/1-2
Type:
Conference Proceedings

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