Stress Modulation of PECVD Silicon Nitride

Stress Modulation of PECVD Silicon Nitride

Author(s):

M. Balseanu

Publication title:

Physics and Chemistry of SiO2 and the Si-SiO2 Interface-5

Title of ser.:

ECS transactions

Ser. no.:

1(1)

Pub. Year:

2005

Page(from):

115

Page(to):

124

Pages:

10

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566774307 [1566774306]

Language:

English

Call no.:

E23400/1-1

Type:

Conference Proceedings

Details

TDL ID:	ZA00047095
Series ID:	PA00000034
Conf. info. (Name):	International Symposium on The Physics and Chemistry of SiO2 and the Si-SiO2 Interface ; Fall Meeting of the Electrochemical Society
Conf. info. (Number):	5th ; 2005
Conf. info. (Venue):	Los Angeles, CA, USA
Conf. info. (Date):	2005.10.16-2005.10.20

Similar Items:

1 Conference Proceedings Post Deposition Ultraviolet Treatment of Silicon Nitride Dielectric: Modeling and Experiment Vladimir Zubkov, Mihaela Balseanu, Li-Qun Xia, Hichem M'Saad Materials Research Society	7 Conference Proceedings Stress Generation in PECVD Silicon Nitride Thin Films for Microelectronics Applications Belyansky, M., Klymko, N., Madan, A., Mallikarjunan, A., Li, Y., Chakravarti, A., Deshpande, S., Domenicucci, A., … Materials Research Society
2 Conference Proceedings PECVD Silicon Nitride For Damascene Applications Lee, Albert, Rajagopalan, Nagarajan, Le, Maggie, Kim, Bok Heon, M’Saad, Hichem Materials Research Society	8 Conference Proceedings High Density Plasma Silicon Carbide As A Barrier/Etch Stop Film For Copper Damascene Interconnects M'Saad, H., Cho, S., Vellaikal, M., Li, Z. Materials Research Society
3 Conference Proceedings Development and Characterization of a PECVD Silicon Nitride for Damascene Applications Lee, A.S., Le, N.Rajagopalan.M., Kim, B.K., Saad, H.M. Electrochemical Society	9 Conference Proceedings High Sensitivity Detection of Silicon Surface Reactions by Photoconductance Decay Norga,G.J., Black,M.R., Black,K.A., M'Saad,H., Michel,J., Kimerling,L.C. Trans Tech Publications
4 Conference Proceedings MONITORING AND OPTIMIZATION OF SILICON SURFACE QUALITY M'saad, H., Michel, J., Reddy, A., Kimerling, L.C. Electrochemical Society	10 Conference Proceedings HDP-FSG Integration in Multilevel Interconnect Devices M'saad, H., Vellaikal, M., Zhang, L., Witty, D. MRS - Materials Research Society
5 Conference Proceedings Determination of residual stress in low-temperature PECVD silicon nitride thin films Martyniuk, M.P., Antoszewski, J., Musca, C.A., Dell, J.M., Faraone, L. SPIE - The International Society of Optical Engineering	11 Conference Proceedings Advanced PECVD-Based Anti-Reflective Coating for 90nm Generation Interconnects Ahn, Sang H., Fung, Miguel, Jung, Keebum, Zhu, Lei, Bencher, Chris, Kim, B.H., M'Saad, Hichem Materials Research Society
6 Conference Proceedings Stress Generation in PECVD silicon Nitride Thin Films for Microelectronics Applications Belyansky, M., Klymko, N., Madan, A., Mallikarjunan, A., Li, Y., Chakravarti, A., Deshpande, S., Domenicucci, A., … Materials Research Society	12 Conference Proceedings Resist Poisoning-Free Advanced PECVD-Based Anti-Reflective Coating (ARC) for 90 nm Technology and Beyond Ahn, Sang H., Rathi, Sudha, Liu, Jean, Botelho, Heraldo, Yeh, Wendy, Seamons, Martin, Witty, Derek, M'Saad, Hichem Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12