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Three-Dimensional Simulation of Thermal Oxidation and the Influence of Stress

Author(s):
Publication title:
Physics and Chemistry of SiO2 and the Si-SiO2 Interface-5
Title of ser.:
ECS transactions
Ser. no.:
1(1)
Pub. Year:
2005
Page(from):
103
Page(to):
114
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774307 [1566774306]
Language:
English
Call no.:
E23400/1-1
Type:
Conference Proceedings

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