Effects of MeV Si Ion Bombardments on the Properties of Nano-Layers of Si0₂/SiO₂+Zn₄Sb₃

Effects of MeV Si Ion Bombardments on the Properties of Nano-Layers of Si0₂/SiO₂+Zn₄Sb₃

Author(s):

S. Budak

Publication title:

Ion-beam-based nanofabrication : symposium held April 10-12, 2007, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

1020

Pub. Year:

2007

Page(from):

207

Page(to):

212

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558999800 [1558999809]

Language:

English

Call no.:

M23500/1020

Type:

Conference Proceedings

Details

TDL ID:	ZA00048536
Series ID:	PA00000011
Conf. info. (Name):	MRS Spring Meeting ; Symposium on Ion-Beamed-Based Nanofabrication
Conf. info. (Number):	2007 ; 2007
Conf. info. (Venue):	San Francisco, California
Conf. info. (Date):	2007.04.10-2007.04.12

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