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Spatially Resolved Characterization of Plastic Deformation Induced by Focused-Ion Beam Processing in Structured InGaN/GaN Layers

Author(s):
R. Barabash
G. Ice
R. Kroger
H. Lohmeyer
K. Sebald
J. Gutowski
I. Bottcher
D. Hommel
W. Liu
J.-S. Chung
5 more
Publication title:
Ion-beam-based nanofabrication : symposium held April 10-12, 2007, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1020
Pub. Year:
2007
Page(from):
21
Page(to):
28
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558999800 [1558999809]
Language:
English
Call no.:
M23500/1020
Type:
Conference Proceedings

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