Blank Cover Image

Comparative Study of Solid-Phase Crystallization of Amorphous Silicon Deposited by Hot-Wire CVD, Plasma-Enhanced CVD, and Electron-Beam Evaporation

Author(s):
Paul Stradins
Oliver Kunz
David L. Young
Yanfa Yan
Kim M. Jones
Yueqin Xu
Robert C. Reedy
Howard M. Branz
Armin G. Aberle
Qi Wang
5 more
Publication title:
Amorphous and polycrystalline thin-film silicon science and technology--2007 : symposium held April 9-13, 2007, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
989
Pub. Year:
2007
Page(from):
391
Page(to):
398
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558999497 [1558999493]
Language:
English
Call no.:
M23500/989
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Solid Phase Crystallization of Hot-Wire CVD Amorphous Silicon Films

Young, David L., Stradins, Paul, Iwaniczko, Eugene, To, Bobby, Reedy, Bob, Yan, Yanfa, Branz, Howard M., Lohr, John, …

Materials Research Society
7 Conference Proceedings The Effect of Oxygen Contamination on the Electronic Properties of Hot-Wire CVD Amorphous Silicon Germanium Alloys

Shouvik Datta, J. David Cohen, Steve L. Golledge, Yueqin Xu, A. H. Mahan, James R. Doyle, Howard M. Branz

Materials Research Society
2 Conference Proceedings Physics of Solid-Phase Epitaxy of Hydrogenated Amorphous Silicon for Thin Film Si Photovoltaics

Paul Stradins, Yanfa Yan, Robert Reedy, David L. Young, Charles W. Teplin, Eugene Iwaniczko, Yueqin Xu, Kim Jones, Glenn …

Materials Research Society
8 Conference Proceedings 17.8%-Efficient Amorphous Silicon Heterojunction Solar Cells on p-type Silicon Wafers

Tihu Wang, Matt P. Page, Eugene Iwancizko, Yueqin Xu, Yanfa Yan, Lorenzo Roybal, Dean Levi, Russell Bauer, Howard M. …

Materials Research Society
3 Conference Proceedings Quality and Growth Rate of Hot-wire Chemical Vapor Deposition Epitaxial Si Layers

Charles W Teplin, Ina T. Martin, Kim M. Jones, David Young, Manuel J. Romero, Robert C. Reedy, Howard M. Branz, Paul …

Materials Research Society
9 Conference Proceedings Amorphous To Microcrystalline Transition In Thickness-Graded Hot-Wire Cvd Silicon Films

Wang, Qi, Perkins, John, Moutinho, Helio, To, Bobby, Branz, Howard M.

Materials Research Society
4 Conference Proceedings Real Time Monitoring of the Crystallization of Hydrogenated Amorphous Silicon

Stradins, Paul, Young, David, Branz, Howard M., Page, Matthew, Wang, Qi

Materials Research Society
10 Conference Proceedings Devices Fabrication With Narrow-Bandgap a-SiGe:H Alloys Deposited by HWCVD

Xu, Yueqin, Yan, Baojie, Nelson, Brent P., Iwaniczko, Eugene, Reedy, Robert C., Mahan, A.H., Branz, Howard

Materials Research Society
5 Conference Proceedings Dependence of the Electronic Properties of Hot-Wire CVD Amorphous Silicon-Germanium Alloys on Oxygen Impurity Levels

Shouvik Datta, J. David Cohen, Yueqin Xu, A.H. Mahan, Howard M. Branz

Materials Research Society
11 Conference Proceedings Hot-Wire Chemical Vapor Deposition Epitaxy on Polycrystalline Silicon Seeds on Glass

Charles W. Teplin, Howard M. Branz, Kim M. Jones, Manuel J. Romero, Paul Stradins, Stefan Gall

Materials Research Society
6 Conference Proceedings Comparative Study of Hot-Wire Chemical Vapor Deposition Onto (100) Si Near 600℃: Epitaxial and Polycrystalline Silicon Films

Charles W. Teplin, Howard M. Branz, Kim M. Jones, Bobby To, Eugene Iwaniczko, Paul Stradins

Materials Research Society
12 Conference Proceedings Influence of Filament and Substrate Temperatures on Structural and Optoelectronic Properties of Narrow Gap a-SiGe:H Alloys Deposited by Hot-Wire CVD

Xu, Yueqin, Nelson, Brent P., Williamson, D. L., Gedvilas, Lynn M., Reedy, Robert C.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12