High Rate Deposition of Amorphous Silicon Based Solar Cells Using Modified Very High Frequency Glow Discharge

High Rate Deposition of Amorphous Silicon Based Solar Cells Using Modified Very High Frequency Glow Discharge

Author(s):

Publication title:

Amorphous and polycrystalline thin-film silicon science and technology--2007 : symposium held April 9-13, 2007, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

989

Pub. Year:

2007

Page(from):

359

Page(to):

364

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558999497 [1558999493]

Language:

English

Call no.:

M23500/989

Type:

Conference Proceedings

Details

TDL ID:	ZA00048532
Series ID:	PA00000011
Conf. info. (Name):	MRS Spring Meeting
Conf. info. (Number):	2007
Conf. info. (Venue):	San Francisco, California
Conf. info. (Date):	2007.04.09-2007.04.13

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