Pure-silica-zeolite low-k dielectric films for computer chips

Pure-silica-zeolite low-k dielectric films for computer chips

Author(s):

Publication title:

From zeolites to porous MOF materials--the 40th anniversary of International Zeolite Conference : proceedings of the 15th International Zeolite Conference, Beijing, P.R. China, 12-17th August 2007

Title of ser.:

Studies in surface science and catalysis

Ser. no.:

170-2

Pub. Year:

2007

Vol.:

170-2

Page(from):

1502

Page(to):

1507

Pages:

6

Pub. info.:

Amsterdam: Elsevier

ISSN:

01672991

ISBN:

9780444531865 [0444531866]

Language:

English

Call no.:

S76950

Type:

Conference Proceedings

Details

TDL ID:	ZA00046708
Series ID:	PA00000031
Conf. info. (Name):	International Zeolite Conference
Conf. info. (Number):	15th
Conf. info. (Venue):	Beijing, P.R. China
Conf. info. (Date):	2007.08.12-2007.08.17

Similar Items:

1 Conference Proceedings (40a) Nutrient-Replenished On-Wafer Crystallization of Pure-Silica-Zeolite Films Christopher M. Lew, Yushan Yan American Institute of Chemical Engineers	7 Conference Proceedings 434b. Effect of Zeolitic-Amorphous Silicas in Spin-on Mel Zeolite Thin Films Yan Liu, Christopher M. Lew, Minwei Sun, Junlan Wang, Yushan Yan American Institute of Chemical Engineers
2 Conference Proceedings (38b) Ultra-Low-k Pure-Silica Zeolite MEL Films by Incorporating Nanosized Voids Qianrong Fang, Christopher Lew, Yushan Yan American Institute of Chemical Engineers	8 Conference Proceedings (3cl) Hierarchical and Nanostructured Zeolite Materials for Computer Microprocessors and Biomass Conversion Christopher M. Lew, Yushan Yan, Michael Tsapatsis American Institute of Chemical Engineers
3 Conference Proceedings (4ea) Zeolite Films and Membranes for Computer Microprocessors and Biofuel Production Christopher M. Lew, Yushan Yan, Michael Tsapatsis American Institute of Chemical Engineers	9 Conference Proceedings 605e. Synthesis and Characterization of Organic-Functionalized Pure-Silica-Zeolite Christopher M. Lew, Zijian Li, Shuang Li, Sonjong Hwang, Dora I. Medina American Institute of Chemical Engineers
4 Conference Proceedings 20-P-11 - Pure-silica zeolite low-k dielectric thin films by spin-on process Wang, Zhen., Wang, H., Mitra, A., Huang, L., Yan, Yu. Elsevier	10 Conference Proceedings Processing and Characterization of Silica Xerogel Films for Low-K Dielectric Applications Gill, W. N., Jain, A., Nitta, S. V., Oehrlein, G. S., Pisupattt, V., Plawsky, J. L., Rogojevic, S., Staert, T. E. F. M., … Materials Research Society
5 Conference Proceedings 570d. Pure-Silica-Zeolite Mel Nanoparticle Suspension Prepared with Evaporation-Assisted Two-Stage Synthesis Method Yan Liu, Minwei Sun, Christopher M. Lew, Junlan Wang, Yushan Yan American Institute of Chemical Engineers	11 Conference Proceedings Nanoporous Silica for Low-K Dielectrics Ramos, T., Rhoderick, K., Roth, R., Brungardt, L., Wallace, S., Drage, J., Dunne, J., Endisch, D., Katsanes, R., … MRS - Materials Research Society
6 Conference Proceedings Interfacial Adhesion of Pure-Silica-Zeolite Low-k Thin Films Hu, Lili, Wang, Junlan, Li, Zijian, Li, Shuang, Yan, Yushan Materials Research Society	12 Conference Proceedings The role of solvation and pH in the nucleation of pure silica zeolites M.J. Mora-Fonz, C.R.A. Catlow, D.W. Lewis Elsevier

1

2

3

4

5

6

7

8

9

10

11

12